[AL enhanced reflection (AL-HR) film]

A hybrid configuration in which a dielectric film is laminated on a metal film AL film By using a mirror with superior scratch resistance and corrosion resistance compared to AL single layer film Become.

In the simplest configuration, the dielectric film is a single layer of high refractive index film (H film). Generally, SiO is used for the H film, and it is written as [AL-SiO]. Reflectivity is slightly lower than AL single layer film, but SiO is an AL film. At the same time, it does not require substrate heating, so it can be deposited on plastic substrates. It is possible to.

In contrast, a low refractive index film (L film) and an H film were applied as dielectric films. The structure is an AL enhanced reflection film. Generally, H film is TiO2, L film is Since MgF2 is used, it is necessary to heat the substrate during film formation. Higher reflectivity than AL single layer film.

Type of AL enhanced reflection film

Two layers of dielectric film `` L + H '' are called AL enhanced reflection film (AL-HR)
In contrast to the four layers of “L + H + L + H”, AL increases reflective film
(AL-HHR), "L + H + L + H + L + H" 6 layers are increasing AL
Sometimes called a reflective film (AL-HHHR).
Usually, the higher the number of dielectric layers, the better the reflectivity, but the reflection
The wavelength band is narrowed.